JPH0171448U - - Google Patents
Info
- Publication number
- JPH0171448U JPH0171448U JP1987165242U JP16524287U JPH0171448U JP H0171448 U JPH0171448 U JP H0171448U JP 1987165242 U JP1987165242 U JP 1987165242U JP 16524287 U JP16524287 U JP 16524287U JP H0171448 U JPH0171448 U JP H0171448U
- Authority
- JP
- Japan
- Prior art keywords
- support part
- grooves
- inclined support
- wafer carrier
- upright support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165242U JPH0171448U (en]) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165242U JPH0171448U (en]) | 1987-10-30 | 1987-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171448U true JPH0171448U (en]) | 1989-05-12 |
Family
ID=31451547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987165242U Pending JPH0171448U (en]) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171448U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0381628U (en]) * | 1989-12-13 | 1991-08-21 |
-
1987
- 1987-10-30 JP JP1987165242U patent/JPH0171448U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0381628U (en]) * | 1989-12-13 | 1991-08-21 |